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Plasma Ashing Equipment - List of Manufacturers, Suppliers, Companies and Products

Plasma Ashing Equipment Product List

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Yamato Material Co., Ltd. Business Introduction

Yamato Material Co., Ltd. Business Introduction

A business that considers the global environment based on consumer trends! Emphasizing planning, development, and proposal capabilities!

Yamato Material Co., Ltd. is a specialized trading company primarily engaged in the fields of "containers and packaging," "production systems," and "electronics-related products." The New Materials Division conducts planning and sales from inspection and packaging to production equipment in the semiconductor and electronics fields. 【Business Overview】 ■ New Materials Division *For more details, please refer to the catalog or feel free to contact us.*

  • Wafer

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Single Wafer Plasma Ashing System (SWP Series)

Single Wafer Plasma Ashing System (SWP Series)

Damage-free, high throughput, multi-purpose compatible high-end devices, compound semiconductors, and MEMS. Extensive track record and comprehensive support. New type now available.

Achieved damage-less ashing using downflow plasma while eliminating charge-up damage. High throughput is realized through high-rate ashing with surface wave plasma (SWP) and an ashing chamber equipped with two rooms. In addition to ashing, the RIE chamber enables the removal of special resists and organic films, as well as the removal of hardened resists after ion implantation. It achieves both the removal of hardened resist on the surface and damage-less ashing of the underlying resist. The adoption of a compact single-wafer load lock chamber and twin-hand robots allows for a compact installation size. Proven capability to handle not only standard wafers but also special substrates such as wafers thicker than 1 mm and rectangular substrates. A versatile single-wafer etching and ashing device.

  • Ashing device
  • Etching Equipment
  • Plasma surface treatment equipment

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